ADHESIVE SHEET FOR PROCESSING OF SEMICONDUCTOR WAFTER

An adhesive sheet for processing of a semiconductor wafer has an adhesive layer disposed on at least one surface of a base substrate, the adhesive layer includes a base polymer, a plasticizer and a surfactant, an SP value of the plasticizer and the surfactant satisfies the relationship: 0.9 (the pla...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: SHINTANI TOSHIO, OOISHI MICHIHITO
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:An adhesive sheet for processing of a semiconductor wafer has an adhesive layer disposed on at least one surface of a base substrate, the adhesive layer includes a base polymer, a plasticizer and a surfactant, an SP value of the plasticizer and the surfactant satisfies the relationship: 0.9 (the plasticizer SP value)/(the surfactant SP value) 1.0. The present invention has the object of providing an adhesive sheet for processing of a semiconductor wafer that exhibits superior storage stability under a range of environments, and that prevents contamination of the adherend after use.