CHARGED PARTICLE GUN AND CHARGED PARTICLE BEAM DEVICE

The present invention provides a charged particle gun including: a charged particle source (1); an extraction electrode (2); an opening (14) through which a charged particle beam passes; and a barrier provided in an area defined by connecting the charged particle source to the opening, the barrier s...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	MURAKOSHI HISAYA, KOKUBO SHIGERU, CHO BOKLAE
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY GAMMA RAY OR X-RAY MICROSCOPES IRRADIATION DEVICES NUCLEAR ENGINEERING NUCLEAR PHYSICS PHYSICS TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOTOTHERWISE PROVIDED FOR
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