FORCE-SENSING DEVICE FOR MEASURING FORCE ON SOLID STATE ACTUATORS, METHOD FOR MEASURING FORCE, AS WELL AS USE OF FORCE-SENSING DEVICE

The present invention relates to a force measuring device comprising an amorphous carbon layer which is disposed on a solid actuator and has piezoresistive properties.

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Bibliographische Detailangaben
Hauptverfasser:	LUTHJE HOLGER, BIEHL SASKIA, MELZ TOBIAS, HEROLD SVEN, MAYER DIRK
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PHYSICS TESTING
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Beschreibung
Zusammenfassung:	The present invention relates to a force measuring device comprising an amorphous carbon layer which is disposed on a solid actuator and has piezoresistive properties.