Stator Structure of Turbo Molecular Pump and Method for Manufacturing the Same

The present invention discloses an improved stator structure of a turbo molecular pump and a method for manufacturing the same. The stator comprises a plurality of stator blade assemblies, and each stator blade assembly comprising an inner shroud ring, an outer shroud ring and a plurality of stator...

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Bibliographische Detailangaben
Hauptverfasser:	HSU KUO-HSUN, HSU CHIH-NENG, CHIANG HSIAO-WEI D, LI CHAO-HUAN, TAI WEING
Format:	Patent
Sprache:	eng
Schlagworte:	BLASTING COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING ENGINE PLANTS IN GENERAL HEATING LIGHTING MACHINE TOOLS MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS MACHINES OR ENGINES IN GENERAL MECHANICAL ENGINEERING METAL-WORKING NOT OTHERWISE PROVIDED FOR NON-POSITIVE DISPLACEMENT MACHINES OR ENGINES, e.g. STEAMTURBINES PERFORMING OPERATIONS STEAM ENGINES TRANSPORTING WEAPONS
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Beschreibung
Zusammenfassung:	The present invention discloses an improved stator structure of a turbo molecular pump and a method for manufacturing the same. The stator comprises a plurality of stator blade assemblies, and each stator blade assembly comprising an inner shroud ring, an outer shroud ring and a plurality of stator blades, wherein the inner shroud ring, the outer shroud ring and the plurality of stator blades are integrated so that the rigidity of the stator is increased and the stator is not easily to be deformed; the method for manufacturing the stator comprises the steps of: laying a raw material on a computer numerical control (CNC) lathe; proceeding an outline treatment to a shape of each stator blade assembly by a turnery process; and shaping the plurality of stator blades of each stator blade assembly with a five-axis processing machine.