APPARATUS WITH MULTIPLE HEATING SYSTEMS FOR IN-LINE THERMAL TREATMENT OF SUBSTRATES

The present invention relates to in-line equipment used to process substrates. In some applications, the equipment is used in the in-line manufacture PV cells or modules. In some embodiments, a heating system is provided that comprises a plurality of heating technologies for the heat treatment of su...

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Bibliographische Detailangaben
Hauptverfasser: REYNOLDS REESE, HELMS, JR. AUBREY L, NILSSON PONTUS K.H, JOHNSON JAMES T, PECK KEVIN B
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:The present invention relates to in-line equipment used to process substrates. In some applications, the equipment is used in the in-line manufacture PV cells or modules. In some embodiments, a heating system is provided that comprises a plurality of heating technologies for the heat treatment of substrates wherein a first heating system is used to rapidly raise the substrate temperature to the desired set point and a second heating system is used to maintain the substrate at the temperature set point throughout the thermal treatment process.