RETAINING RING WITH SHAPED SURFACE

A retaining ring can be shaped by machining or lapping the bottom surface of the ring to form a shaped profile in the bottom surface. The bottom surface of the retaining ring can include flat, sloped and curved portions. The lapping can be performed using a machine that dedicated for use in lapping...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	BALAGANI VENKATA R, ZUNIGA STEVEN M, DOAN TRUNG T, HUGHES KERRY F, FONG MICHAEL JON, HUEY SIDNEY P, CHEN HUNG CHIH, WOHLERT MARTIN S, WANG JAMES C, MCALLISTER DOUGLAS R, LIN JIAN, OH JEONGHOON, MEYER STACY, DE LAMENIE ROMAIN BEAU, SCHMIDT JEFFREY, ALLEN ADEN MARTIN, LU DANNY CAM TOAN, GARRETSON CHARLES C
Format:	Patent
Sprache:	eng
Schlagworte:	DRESSING OR CONDITIONING OF ABRADING SURFACES FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING PERFORMING OPERATIONS POLISHING TRANSPORTING
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Beschreibung
Zusammenfassung:	A retaining ring can be shaped by machining or lapping the bottom surface of the ring to form a shaped profile in the bottom surface. The bottom surface of the retaining ring can include flat, sloped and curved portions. The lapping can be performed using a machine that dedicated for use in lapping the bottom surface of retaining rings. During the lapping the ring can be permitted to rotate freely about an axis of the ring. The bottom surface of the retaining ring can have curved or flat portions.