MATERIAL HAVING A LOW DIELECTRIC KONSTANT AND METHOD OF MAKING THE SAME

There is disclosed a method for producing a highly cross-linked polypropylene material by plasma polymerisation of a carbon containing gas, not specifically propylene, exhibiting low relative permittivity, high thermal stability and enhanced mechanical properties, said method and material being suit...

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Bibliographische Detailangaben
Hauptverfasser: SILVA SEMBUKUTTIARACHILAGE RAVI PRADIP, ESTEFANIA JOSE VIRGILIO ANGUITA RODRIGUEZ
Format: Patent
Sprache:eng
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Zusammenfassung:There is disclosed a method for producing a highly cross-linked polypropylene material by plasma polymerisation of a carbon containing gas, not specifically propylene, exhibiting low relative permittivity, high thermal stability and enhanced mechanical properties, said method and material being suitable for application not limited to interlayer dielectric deposition in microchip fabrication.