THIN-FILM SOLAR FABRICATION PROCESS, DEPOSITION METHOD FOR TCO LAYER, AND SOLAR CELL PRECURSOR LAYER STACK

THIN-FILM SOLAR FABRICATION PROCESS, DEPOSITION METHOD FOR TCO LAYER, AND SOLAR CELL PRECURSOR LAYER STACK

Methods of depositing a TCO layer on a substrate and precursor for solar cells are described. A method of depositing a TCO layer 102, 204, 404, 604 on a substrate 102, 8091 includes providing a glass substrate having a first alkali metal concentration, conditioning the glass substrate, wherein the c...

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Bibliographische Detailangaben
Hauptverfasser: SOMMER ELISABETH, OBERMEYER PHILIPP, SEVERIN DANIEL, VERHAVERBEKE STEVEN, KRESS MARKUS, SUPRITZ ANTON, SCHMIDT URSULA INGEBORG, VERMEIR INGE, KUHR NIELS
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Zusammenfassung:Methods of depositing a TCO layer on a substrate and precursor for solar cells are described. A method of depositing a TCO layer 102, 204, 404, 604 on a substrate 102, 8091 includes providing a glass substrate having a first alkali metal concentration, conditioning the glass substrate, wherein the conditioning comprises at least one step selected from the group consisting of: applying a liquid to the substrate to form a layer with a second alkali metal layer concentration higher than the first alkali metal concentration, and depositing a layer to form a layer with a second alkali metal layer concentration higher than the first alkali metal concentration, and depositing a TCO layer over the conditioned substrate