FERRO-ELECTRIC CAPACITOR MODULES, METHODS OF MANUFACTURE AND DESIGN STRUCTURES

Ferro-electric capacitor modules, methods of manufacture and design structures. The method of manufacturing the ferro-electric capacitor includes forming a barrier layer on an insulator layer of a CMOS structure. The method further includes forming a top plate and a bottom plate over the barrier lay...

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Bibliographische Detailangaben
Hauptverfasser: PASTEL PAUL W, PHILIPS BRETT A, MURPHY WILLIAM J, GAMBINO JEFFREY P, NAKOS JAMES S, MOON MATTHEW D
Format: Patent
Sprache:eng
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Zusammenfassung:Ferro-electric capacitor modules, methods of manufacture and design structures. The method of manufacturing the ferro-electric capacitor includes forming a barrier layer on an insulator layer of a CMOS structure. The method further includes forming a top plate and a bottom plate over the barrier layer. The method further includes forming a ferro-electric material between the top plate and the bottom plate. The method further includes encapsulating the barrier layer, top plate, bottom plate and ferro-electric material with an encapsulating material. The method further includes forming contacts to the top plate and bottom plate, through the encapsulating material. At least the contact to the top plate and a contact to a diffusion of the CMOS structure are in electrical connection through a common wire.