NONCONTACT SURFACE SHAPE MEASURING METHOD AND APPARATUS THEREOF

NONCONTACT SURFACE SHAPE MEASURING METHOD AND APPARATUS THEREOF

Even if a return beam from a work to be measured does not agree with the center of a two-piece sensor, a correction value is calculated according to a voltage difference between two sensors of the two-piece sensor if the voltage difference is within a neighborhood range. The correction value is adde...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: TSUKAMOTO TAKAO, ISHIMA MINORU, HIROSE HAJIME, MIURA KATSUHIRO, KOTAJIMA HIDEO
Format: Patent
Sprache:eng
Schlagworte:
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
PHYSICS
TESTING
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Beschreibung
Zusammenfassung:Even if a return beam from a work to be measured does not agree with the center of a two-piece sensor, a correction value is calculated according to a voltage difference between two sensors of the two-piece sensor if the voltage difference is within a neighborhood range. The correction value is added to an actual position of an objective lens in an up-down direction, to calculate a movement amount of the objective lens up to a focused state (a state in which the return beam agrees with the center of the two-piece sensor).