PHOTO-CURABLE TRANSFER SHEET AND METHOD FOR FORMING CONCAVE-CONVEX PATTERN USING THE SAME

The present invention is to provide a photo-curable transfer sheet suitable for the preparation of an intermediate stamper in a nanoimprint method, in which the peeling property from a mold having a fine concave-convex pattern used in the preparation of the intermediate stamper and the peeling prope...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KAIDA EIZOU, HASHIMOTO MASASHI, INAMIYA TAKATO
Format: Patent
Sprache:eng
Schlagworte:
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