PHOTO-CURABLE TRANSFER SHEET AND METHOD FOR FORMING CONCAVE-CONVEX PATTERN USING THE SAME

The present invention is to provide a photo-curable transfer sheet suitable for the preparation of an intermediate stamper in a nanoimprint method, in which the peeling property from a mold having a fine concave-convex pattern used in the preparation of the intermediate stamper and the peeling prope...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KAIDA EIZOU, HASHIMOTO MASASHI, INAMIYA TAKATO
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:The present invention is to provide a photo-curable transfer sheet suitable for the preparation of an intermediate stamper in a nanoimprint method, in which the peeling property from a mold having a fine concave-convex pattern used in the preparation of the intermediate stamper and the peeling property of a cured photo-curable resin that is a product having a fine concave-convex pattern transferred from the intermediate stamper are excellent, and the adhesion to a base film is good; and a method for forming a concave-convex pattern by using the above-mentioned photo-curable transfer sheet. The photo-curable transfer sheet 10 having a photo-curable transfer layer 11 comprising a photo-curable composition deformable by application of pressure, wherein the photo-curable composition comprises as a lubricant a silicone resin and/or a fluorine-atom-containing ethylenic compound, and a surface energy of the photo-curable transfer layer 11 is more than 20 mN/m and less than 30 mN/m; and a method for forming a concave-convex pattern by using the sheet.