ENCLOSED VERTICAL RACK FOR STORING AND TRANSPORTING LARGE SUBSTRATES

An enclosed vertical rack is provided for storing and transporting large substrates. The enclosed vertical rack comprises a movable base, an enclosure on the movable base for accommodating substrates, an alignment facility in the enclosure for receiving substrates, and a sealable door for enclose th...

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Bibliographische Detailangaben
Hauptverfasser:	SULLIVAN JEFFREY S, LANDESS JAMES, LANGNER PETER, KANKANALA PENCHALA
Format:	Patent
Sprache:	eng
Schlagworte:	ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR BASIC ELECTRIC ELEMENTS CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS,e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES,DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING THIN OR FILAMENTARY MATERIAL PACKAGES PACKAGING ELEMENTS PACKING PERFORMING OPERATIONS SEMICONDUCTOR DEVICES STORING TRANSPORTING
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Beschreibung
Zusammenfassung:	An enclosed vertical rack is provided for storing and transporting large substrates. The enclosed vertical rack comprises a movable base, an enclosure on the movable base for accommodating substrates, an alignment facility in the enclosure for receiving substrates, and a sealable door for enclose the enclosure. The enclosure has a gas inlet, and the enclosure or the door has a gas outlet.