APPARATUS AND METHOD FOR ANALYZING OUT-GASSING OF MOLECULAR CONTAMINANTS FROM A SAMPLE

APPARATUS AND METHOD FOR ANALYZING OUT-GASSING OF MOLECULAR CONTAMINANTS FROM A SAMPLE

The invention relates to an apparatus (100, 200) and method for analyzing out-gassing of molecular contaminants (22) from a sample (2). The apparatus (100, 200) comprises a low pressure chamber (1) for accommodating the sample (2), wherein the pressure inside the low pressure chamber (1) is between...

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Bibliographische Detailangaben
Hauptverfasser: BISSCHOPS THEO H.J, SOERS RUUD JOHA THEODORUS, DE BOXX PIETER KLAAS, KRUSEMANN PAUL V.E
Format: Patent
Sprache:eng
Schlagworte:
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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Beschreibung
Zusammenfassung:The invention relates to an apparatus (100, 200) and method for analyzing out-gassing of molecular contaminants (22) from a sample (2). The apparatus (100, 200) comprises a low pressure chamber (1) for accommodating the sample (2), wherein the pressure inside the low pressure chamber (1) is between 10−3 mbar and 10 mbar. Furthermore, the apparatus (100, 200) comprises a means (4, 5, 7, 9) for providing a laminar gas flow (12, 33, 34) in the low pressure chamber (1) wherein a first part of the gas flow (13, 35) captures and transports molecular contaminants (22) out-gassed from the sample (2), and a means (3, 40) at a first location downstream from the sample (2) for receiving the first part (13, 35) of the gas flow. An analyzer (3) analyzes the contents of the first part (13, 35) of the gas flow.