SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME

A semiconductor device includes a semiconductor chip; and a scribe line disposed in an adjacent way to and around the semiconductor chip. The scribe line comprises an interlayer insulating film and an accessory. The accessory comprises a first portion with a layer shape formed on the interlayer insu...

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1. Verfasser: ETO TOYONORI
Format: Patent
Sprache:eng
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Zusammenfassung:A semiconductor device includes a semiconductor chip; and a scribe line disposed in an adjacent way to and around the semiconductor chip. The scribe line comprises an interlayer insulating film and an accessory. The accessory comprises a first portion with a layer shape formed on the interlayer insulating film and a second portion extending downward from the first portion into the interlayer insulating film in a thickness direction thereof.