Apparatus for Movable and Weight-Compensating Suspension of a Focusing Objective of a Laser System
An apparatus for movable weight-compensating suspension of a focussing objective of a laser system comprises a force generation device to generate a counterforce component G which counteracts the weight of the focussing objective, a transmission device which transmits the counterforce component G on...
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Zusammenfassung: | An apparatus for movable weight-compensating suspension of a focussing objective of a laser system comprises a force generation device to generate a counterforce component G which counteracts the weight of the focussing objective, a transmission device which transmits the counterforce component G onto the focussing objective and permits upward/downward compensatory movement of the focussing objective, in such a way that in the case of an upward/downward compensatory movement of the focussing objective, an optical axis (O) of the focussing objective maintains at least its orientation in space, and preferably its position in space. |
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