FILM FORMING MATERIAL FEEDING APPARATUS

A film forming material feeding apparatus including a feeder, and a chute for sliding film forming materials supplied from the feeder into a material receiving part of a hearth, in which the chute has a bottom part for allowing the film forming materials to slide, and side parts provided at both sid...

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Bibliographische Detailangaben
Hauptverfasser:	OOE YOSHINAO, IMANAKA SEIJI, MIZOKAMI KANAME
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL CONVEYING DIFFUSION TREATMENT OF METALLIC MATERIAL HANDLING THIN OR FILAMENTARY MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS SHOP CONVEYOR SYSTEMS STORING SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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Beschreibung
Zusammenfassung:	A film forming material feeding apparatus including a feeder, and a chute for sliding film forming materials supplied from the feeder into a material receiving part of a hearth, in which the chute has a bottom part for allowing the film forming materials to slide, and side parts provided at both sides of the bottom part, and the bottom part and the side parts are connected by way of an arc-shape part, and thereby bridging of the film forming materials on the chute is suppressed, so that a stable supply of the film forming materials may be realized.