LITHOGRAPHIC APPARATUS, REMOVABLE MEMBER AND DEVICE MANUFACTURING METHOD

A sealing member is provided to prevent immersion liquid ingress to a gap between components. The sealing member has a plastic or polymer sealing portion that is adhered to the components forming the gap being sealed. The sealing member is constructed so as to reduce the force-coupling, in particula...

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Bibliographische Detailangaben
Hauptverfasser:	LIEBREGTS PAULUS MARTINUS MARIA, DE ROOIJ GERARDUS MARTINUS ANTONIUS, BADAM VIJAY KUMAR, VAN DE KERKHOF MARCUS ADRIANUS, DE KRUIJF NIEK ELOUT, DE GRAFF ROELOF FREDERIK, SONDAG-HUETHORST JOHANNA ANTOINETTE MARIA, LEENDERS MARTINUS HENDRIKUS ANTONIUS, DZIOMKINA NINA VLADIMIROVNA, HOUBEN MARTIJN
Format:	Patent
Sprache:	eng
Schlagworte:	ACCESSORIES THEREFOR ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE ADHESIVES APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USINGWAVES OTHER THAN OPTICAL WAVES APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FORPROJECTING OR VIEWING THEM BLASTING CHEMISTRY CINEMATOGRAPHY CYLINDERS DYES ELECTROGRAPHY ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS HEATING HOLOGRAPHY LIGHTING MECHANICAL ENGINEERING METALLURGY MISCELLANEOUS APPLICATIONS OF MATERIALS MISCELLANEOUS COMPOSITIONS NATURAL RESINS NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL PAINTS PHOTOGRAPHY PHYSICS PISTONS POLISHES SEALINGS THERMAL INSULATION IN GENERAL USE OF MATERIALS AS ADHESIVES WEAPONS
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Beschreibung
Zusammenfassung:	A sealing member is provided to prevent immersion liquid ingress to a gap between components. The sealing member has a plastic or polymer sealing portion that is adhered to the components forming the gap being sealed. The sealing member is constructed so as to reduce the force-coupling, in particular the time-related force-coupling, between the components being sealed.