COMPUTER-IMPLEMENTED METHODS, COMPUTER-READABLE MEDIA, AND SYSTEMS FOR CLASSIFYING DEFECTS DETECTED IN A MEMORY DEVICE AREA ON A WAFER

COMPUTER-IMPLEMENTED METHODS, COMPUTER-READABLE MEDIA, AND SYSTEMS FOR CLASSIFYING DEFECTS DETECTED IN A MEMORY DEVICE AREA ON A WAFER

Computer-implemented methods, computer-readable media, and systems for classifying defects detected in a memory device area on a wafer are provided.

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Bibliographische Detailangaben
Hauptverfasser: PAE YEONHO, CHANG ELLIS, CHOI SUNYONG
Format: Patent
Sprache:eng
Schlagworte:
CALCULATING
COMPUTING
COUNTING
ELECTRIC COMMUNICATION TECHNIQUE
ELECTRICITY
HANDLING RECORD CARRIERS
INFORMATION STORAGE
PHYSICS
PICTORIAL COMMUNICATION, e.g. TELEVISION
PRESENTATION OF DATA
RECOGNITION OF DATA
RECORD CARRIERS
STATIC STORES
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Beschreibung
Zusammenfassung:Computer-implemented methods, computer-readable media, and systems for classifying defects detected in a memory device area on a wafer are provided.