EXTREME UV RADIATION GENERATING DEVICE COMPRISING A CONTAMINATION CAPTOR
The invention relates to an improved EUV generating device having a contamination captor for "catching" contamination and/or debris caused by corrosion or otherwise unwanted reactions of the tin bath.
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| creator | WEBER ACHIM METZMACHER CHRISTOF |
| description | The invention relates to an improved EUV generating device having a contamination captor for "catching" contamination and/or debris caused by corrosion or otherwise unwanted reactions of the tin bath. |
| format | Patent |
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APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USINGWAVES OTHER THAN OPTICAL WAVES ; APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FORPROJECTING OR VIEWING THEM ; CINEMATOGRAPHY ; ELECTROGRAPHY ; HOLOGRAPHY ; PHOTOGRAPHY ; PHYSICS</subject><creationdate>2011</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20110728&DB=EPODOC&CC=US&NR=2011181848A1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25563,76418</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20110728&DB=EPODOC&CC=US&NR=2011181848A1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>WEBER ACHIM</creatorcontrib><creatorcontrib>METZMACHER CHRISTOF</creatorcontrib><title>EXTREME UV RADIATION GENERATING DEVICE COMPRISING A CONTAMINATION CAPTOR</title><description>The invention relates to an improved EUV generating device having a contamination captor for "catching" contamination and/or debris caused by corrosion or otherwise unwanted reactions of the tin bath.</description><subject>ACCESSORIES THEREFOR</subject><subject>APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USINGWAVES OTHER THAN OPTICAL WAVES</subject><subject>APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FORPROJECTING OR VIEWING THEM</subject><subject>CINEMATOGRAPHY</subject><subject>ELECTROGRAPHY</subject><subject>HOLOGRAPHY</subject><subject>PHOTOGRAPHY</subject><subject>PHYSICS</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2011</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZPBwjQgJcvV1VQgNUwhydPF0DPH091Nwd_VzDQIy_dwVXFzDPJ1dFZz9fQOCPINBIo5Ajl-Io6-nH0Sxs2NAiH8QDwNrWmJOcSovlOZmUHZzDXH20E0tyI9PLS5ITE7NSy2JDw02MjA0NLQwtDCxcDQ0Jk4VAMzaLfQ</recordid><startdate>20110728</startdate><enddate>20110728</enddate><creator>WEBER ACHIM</creator><creator>METZMACHER CHRISTOF</creator><scope>EVB</scope></search><sort><creationdate>20110728</creationdate><title>EXTREME UV RADIATION GENERATING DEVICE COMPRISING A CONTAMINATION CAPTOR</title><author>WEBER ACHIM ; 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| language | eng |
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| subjects | ACCESSORIES THEREFOR APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USINGWAVES OTHER THAN OPTICAL WAVES APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FORPROJECTING OR VIEWING THEM CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY PHOTOGRAPHY PHYSICS |
| title | EXTREME UV RADIATION GENERATING DEVICE COMPRISING A CONTAMINATION CAPTOR |
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