EXTREME UV RADIATION GENERATING DEVICE COMPRISING A CONTAMINATION CAPTOR

The invention relates to an improved EUV generating device having a contamination captor for "catching" contamination and/or debris caused by corrosion or otherwise unwanted reactions of the tin bath.

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Bibliographische Detailangaben
Hauptverfasser:	WEBER ACHIM, METZMACHER CHRISTOF
Format:	Patent
Sprache:	eng
Schlagworte:	ACCESSORIES THEREFOR APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USINGWAVES OTHER THAN OPTICAL WAVES APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FORPROJECTING OR VIEWING THEM CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY PHOTOGRAPHY PHYSICS
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Beschreibung
Zusammenfassung:	The invention relates to an improved EUV generating device having a contamination captor for "catching" contamination and/or debris caused by corrosion or otherwise unwanted reactions of the tin bath.