METHODS OF FORMING A SEMICONDUCTOR CELL ARRAY REGION, METHOD OF FORMING A SEMICONDUCTOR DEVICE INCLUDING THE SEMICONDUCTOR CELL ARRAY REGION, AND METHOD OF FORMING A SEMICONDUCTOR MODULE INCLUDING THE SEMICONDUCTOR DEVICE

METHODS OF FORMING A SEMICONDUCTOR CELL ARRAY REGION, METHOD OF FORMING A SEMICONDUCTOR DEVICE INCLUDING THE SEMICONDUCTOR CELL ARRAY REGION, AND METHOD OF FORMING A SEMICONDUCTOR MODULE INCLUDING THE SEMICONDUCTOR DEVICE

Methods of forming a semiconductor cell array region, a method of forming a semiconductor device including the semiconductor cell array region, and a method of forming a semiconductor module including the semiconductor device are provided, the methods of forming the semiconductor cell array region i...

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Bibliographische Detailangaben
Hauptverfasser: SON YONG-HOON, LEE BYEONGAN, LEE SUN-GHIL, HYUN SUNG-WOO
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Zusammenfassung:Methods of forming a semiconductor cell array region, a method of forming a semiconductor device including the semiconductor cell array region, and a method of forming a semiconductor module including the semiconductor device are provided, the methods of forming the semiconductor cell array region include preparing a semiconductor plate. A semiconductor layer may be formed over the semiconductor plate. The semiconductor layer may be etched to form semiconductor pillars over the semiconductor plate.