IMPRINT MATERIAL AND PROCESSING METHOD

According to one embodiment, an imprint material includes a resin and a plurality of fine particles. The resin is cured from a liquid state by receiving energy while being in contact with a protrusion-depression pattern of a template. The plurality of fine particles are contained in a solid state in...

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Bibliographische Detailangaben
1. Verfasser:	TOKUE HIROSHI
Format:	Patent
Sprache:	eng
Schlagworte:	AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING CHEMISTRY COMPOSITIONS BASED THEREON COMPOSITIONS OF MACROMOLECULAR COMPOUNDS METALLURGY ORGANIC MACROMOLECULAR COMPOUNDS PERFORMING OPERATIONS SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDEDFOR SHAPING OR JOINING OF PLASTICS THEIR PREPARATION OR CHEMICAL WORKING-UP TRANSPORTING WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
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Beschreibung
Zusammenfassung:	According to one embodiment, an imprint material includes a resin and a plurality of fine particles. The resin is cured from a liquid state by receiving energy while being in contact with a protrusion-depression pattern of a template. The plurality of fine particles are contained in a solid state in the resin and are different from the resin in volume shrinkage ratio upon receiving the energy.