Electrical Connection System, Lithographic Projection Apparatus, Device Manufacturing Method and Method for Manufacturing an Electrical Connection System

An electrical connection system is disclosed. The electrical connection system comprises a housing, an elongate conductor and a flexible planar electrical connector. The housing comprises a front plate having a conducting surface and a back plate having a conducting surface. The elongate conductor e...

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Bibliographische Detailangaben
1. Verfasser:	DAMEN JOHANNES WILHELMUS
Format:	Patent
Sprache:	eng
Schlagworte:	ACCESSORIES THEREFOR APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USINGWAVES OTHER THAN OPTICAL WAVES APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FORPROJECTING OR VIEWING THEM BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY CURRENT COLLECTORS ELECTRICITY ELECTROGRAPHY HOLOGRAPHY LINE CONNECTORS PHOTOGRAPHY PHYSICS
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Beschreibung
Zusammenfassung:	An electrical connection system is disclosed. The electrical connection system comprises a housing, an elongate conductor and a flexible planar electrical connector. The housing comprises a front plate having a conducting surface and a back plate having a conducting surface. The elongate conductor extends through the front plate. The flexible planar electrical connector comprises a laminate that comprises, in order, a first flexible planar insulating layer, a conductor configured to carry an electrical current and a second flexible planar insulating layer. The flexible planar electrical connector is sandwiched by and extends beyond the front plate and the back plate. The elongate conductor is electrically connected to the conductor of the planar connector.