MEMS MICROPHONE ARRAY ON A CHIP

The present invention relates to microelectromechanical systems (MEMS). In particular, the present invention relates to MEMS arrays for use in acoustics and other applications.

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Bibliographische Detailangaben
Hauptverfasser:	WHITE ROBERT D, KRAUSE JOSHUA S
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS DEAF-AID SETS ELECTRIC COMMUNICATION TECHNIQUE ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS MEASURING PHYSICS PUBLIC ADDRESS SYSTEMS SEMICONDUCTOR DEVICES TESTING TESTING STATIC OR DYNAMIC BALANCE OF MACHINES ORSTRUCTURES TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR
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Beschreibung
Zusammenfassung:	The present invention relates to microelectromechanical systems (MEMS). In particular, the present invention relates to MEMS arrays for use in acoustics and other applications.