Lithographic Projection Apparatus

A lithographic apparatus arranged to transfer a pattern onto a substrate is disclosed. The lithographic apparatus comprises a power supply and an electrical connector. The electrical connector electrically connects the power supply to another component of the lithographic apparatus. The electrical c...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	SIJBEN ANKO JOZEF CORNELUS, FRANCISCA VAN GOMPEL PETRUS ALBERTUS JOHANNES, DAMEN JOHANNES WILHELMUS, LANGELER HERMANNUS ANTONIUS, DEKKERS JEROEN-FRANK, BRINKHOF EUGENE MARIA, ROZENVELD JOHANNES ALBERT
Format:	Patent
Sprache:	eng
Schlagworte:	ACCESSORIES THEREFOR APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USINGWAVES OTHER THAN OPTICAL WAVES APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FORPROJECTING OR VIEWING THEM BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY CURRENT COLLECTORS ELECTRICITY ELECTROGRAPHY HOLOGRAPHY LINE CONNECTORS PHOTOGRAPHY PHYSICS
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Beschreibung
Zusammenfassung:	A lithographic apparatus arranged to transfer a pattern onto a substrate is disclosed. The lithographic apparatus comprises a power supply and an electrical connector. The electrical connector electrically connects the power supply to another component of the lithographic apparatus. The electrical connector comprises a laminate that comprises, in order, a first conducting layer, a first flexible insulating layer, a conductor configured to carry an electrical current, a second flexible insulating layer and a second conducting layer.