TEST CHIPLETS FOR DEVICES

A method of forming a device is disclosed. The method includes providing a substrate on which the device is formed. It also includes forming a test cell on the substrate. The test cell includes a defect programmed into the cell to facilitate defect detection.

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Bibliographische Detailangaben
Hauptverfasser: LIM VICTOR SENG KEONG, GN FANG HONG, HSIA LIANG CHOO, WAI RACHEL YIE FANG
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:A method of forming a device is disclosed. The method includes providing a substrate on which the device is formed. It also includes forming a test cell on the substrate. The test cell includes a defect programmed into the cell to facilitate defect detection.