DIAMOND APPARATUS AND METHOD OF MANUFACTURE

A method of manufacturing a diamond apparatus includes forming an insulating layer on a surface of a substrate, forming a masking layer on a surface of the insulating layer, and forming a photoresist layer on a surface of the masking layer. A portion of the photoresist layer is cross-linked through...

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Bibliographische Detailangaben
Hauptverfasser:	SABENS DAVID M, HALPERN JEFFREY M, HAYMAN CLIFFORD C, MARTIN HEIDI B, HESS ALLISON E, ZORMAN CHRISTAIN A
Format:	Patent
Sprache:	eng
Schlagworte:	APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIAGNOSIS DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTROTHERAPY GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS HUMAN NECESSITIES HYGIENE IDENTIFICATION INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL LAYERED PRODUCTS LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT ORNON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM MAGNETOTHERAPY MEDICAL OR VETERINARY SCIENCE METALLURGY PERFORMING OPERATIONS PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL RADIATION THERAPY SPRAYING OR ATOMISING IN GENERAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION SURGERY TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION TECHNICAL SUBJECTS COVERED BY FORMER USPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TRANSPORTING ULTRASOUND THERAPY
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Beschreibung
Zusammenfassung:	A method of manufacturing a diamond apparatus includes forming an insulating layer on a surface of a substrate, forming a masking layer on a surface of the insulating layer, and forming a photoresist layer on a surface of the masking layer. A portion of the photoresist layer is cross-linked through exposure to light, leaving a portion of the photoresist layer non-cross-linked. The non-cross-linked portion of the photoresist layer is removed from the masking layer, thus exposing a portion of the masking layer. The method further includes removing the exposed masking layer portion. Any remaining portion of the cross-linked photoresist layer is also removed, resulting in the formation of a patterned masking layer extending from the insulation layer. Diamond material is seeded onto the patterned masking layer and an exposed portion of the insulation layer. The masking layer is removed, resulting in a patterned diamond apparatus extending from the insulating layer