Drive laser for EUV light source

Drive laser for EUV light source

A device is described herein which may comprise an oscillator having an oscillator cavity length, L0, and defining an oscillator path; and a multi-pass optical amplifier coupled with the oscillator to establish a combined optical cavity including the oscillator path, the combined cavity having a len...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: FOMENKOV IGOR V, ERSHOV ALEXANDER I, BOWERING NORBERT R, HOFFMAN JERZY R
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
DEVICES USING STIMULATED EMISSION
ELECTRICITY
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Beschreibung
Zusammenfassung:A device is described herein which may comprise an oscillator having an oscillator cavity length, L0, and defining an oscillator path; and a multi-pass optical amplifier coupled with the oscillator to establish a combined optical cavity including the oscillator path, the combined cavity having a length, Lcombined, where Lcombined=(N+x)*L0, where "N" is an integer and "x" is a number between 0.4 and 0.6.