METHOD OF FABRICATING ESD DEVICES USING MOSFET AND LDMOS ION IMPLANTATIONS
A method of forming complementary metal-oxide-silicon logic field effect transistors, high power transistors and electrostatic discharge protection diodes and/or electrostatic discharge protection shunt transistors on the same integrated circuit chip using ion implantations used to fabricate the fie...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | A method of forming complementary metal-oxide-silicon logic field effect transistors, high power transistors and electrostatic discharge protection diodes and/or electrostatic discharge protection shunt transistors on the same integrated circuit chip using ion implantations used to fabricate the field effect transistors and high-power transistor to simultaneously fabricate the electrostatic discharge protection diodes and/or electrostatic discharge protection shunt transistors. |
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