METHOD AND APPARATUS FOR WIRELESS TRANSMISSION OF DIAGNOSTIC INFORMATION

METHOD AND APPARATUS FOR WIRELESS TRANSMISSION OF DIAGNOSTIC INFORMATION

The present disclosure provides a system for fabricating a semiconductor device. The system includes a semiconductor fabrication tool. The semiconductor fabrication tool has an integrated inter interface that measures a first process parameter of the fabrication tool. The system also includes a wire...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: WANG YEHIEH, PAI JIUN-RONG, LIU HSU-SHUI
Format: Patent
Sprache:eng
Schlagworte:
CALCULATING
COMPUTING
COUNTING
ELECTRIC DIGITAL DATA PROCESSING
PHYSICS
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Beschreibung
Zusammenfassung:The present disclosure provides a system for fabricating a semiconductor device. The system includes a semiconductor fabrication tool. The semiconductor fabrication tool has an integrated inter interface that measures a first process parameter of the fabrication tool. The system also includes a wireless sensor. The wireless sensor is detachably coupled to the fabrication tool. The wireless sensor measures a second process parameter of the fabrication tool. The second process parameter is different from the first process parameter.