PROTECTED METALLIC TIP OR METALLIZED SCANNING PROBE MICROSCOPY TIP FOR OPTICAL APPLICATIONS

PROTECTED METALLIC TIP OR METALLIZED SCANNING PROBE MICROSCOPY TIP FOR OPTICAL APPLICATIONS

The present invention generally relates to a protected metallic or metallized scanning probe microscopy tip for apertureless near-field optical applications which comprise a metallic tip or a metallic structure covering a scanning probe microscopy tip, protected by an ultrathin dielectric layer. In...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: FOSTER MARK D, SOKOLOV ALEXEI, MALKOVSKIY AUDREY, HARTSCHUH RYAN, BARRIOS CARLOS A
Format: Patent
Sprache:eng
Schlagworte:
APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM]
MEASURING
PHYSICS
SCANNING-PROBE TECHNIQUES OR APPARATUS
TESTING
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Beschreibung
Zusammenfassung:The present invention generally relates to a protected metallic or metallized scanning probe microscopy tip for apertureless near-field optical applications which comprise a metallic tip or a metallic structure covering a scanning probe microscopy tip, protected by an ultrathin dielectric layer. In one embodiment, the protective layer is comprised of SiOx, AI2O3, or any other hard ultrathin dielectric layer that extends the lifetime of the tip by providing mechanical, chemical, and thermal protection to the entire structure.