Method of Collective Fabrication of Calibration-Free Temperature and/or Strain Sensors by Matching of Resonators on the Basis of Resonant Frequency and Static Capacitance Criteria

A method of collective fabrication of remotely interrogatable sensors, each sensor comprising at least one first resonator and one second resonator, each resonator comprising acoustic wave transducers designed such that they exhibit respectively a first and a second operating frequency, is provided. The method comprises the fabrication of a first series of first resonators (RT1i) exhibiting a first resonant frequency at ambient temperature (f1i) and a first static capacitance (C1i); the fabrication of a second series of second resonators (RT2j) exhibiting a second resonant frequency at ambient temperature (f2j) and a second static capacitance (C2j); a series of electrical measurements of the set of the first series of first resonators and of the set of the second series of second resonators, so as to determine first pairs (f1i, C1i) and second pairs (f2j, C2j) of resonant frequency and of capacitance of each of the first and second resonators; and a series of matchings of a first resonator (RT1i) and of a second resonator (RT2j) according to the aggregate of the following two criteria: the dispersion in the difference in resonant frequency (f1i−f2j) is less than a first threshold value (Sf) and the dispersion in the difference in static capacitance (C1i−C2j) is less than a second threshold value (Sc).