CALIBRATION STANDARDS FOR ELECTRON MICROSCOPES AND ELECTRON COLUMN TOOLS
A calibration standard structured to obtain both morphology and chemistry information with respect to particles analyzed simultaneously. The standard is structured to verify the accuracy of the data obtained in the particle analysis. Related methods of manufacture and use are provided.
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | A calibration standard structured to obtain both morphology and chemistry information with respect to particles analyzed simultaneously. The standard is structured to verify the accuracy of the data obtained in the particle analysis. Related methods of manufacture and use are provided. |
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