CALIBRATION STANDARDS FOR ELECTRON MICROSCOPES AND ELECTRON COLUMN TOOLS

A calibration standard structured to obtain both morphology and chemistry information with respect to particles analyzed simultaneously. The standard is structured to verify the accuracy of the data obtained in the particle analysis. Related methods of manufacture and use are provided.

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Bibliographische Detailangaben
1. Verfasser: MASTOVICH JOHN
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A calibration standard structured to obtain both morphology and chemistry information with respect to particles analyzed simultaneously. The standard is structured to verify the accuracy of the data obtained in the particle analysis. Related methods of manufacture and use are provided.