METHOD OF MANUFACTURING LOCALIZED SEMICONDUCTOR-ON-INSULATOR (SOI) STRUCTURES IN A BULK SEMIDONDUCTOR WAFER

A method of forming a localized SOI structure in a substrate (10) wherein a trench (18) is formed in the substrate, and a dielectric layer (20) is formed on the base of the trench (18). The trench is filled with semiconductor material (22) by means of epitaxial growth.

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Bibliographische Detailangaben
1. Verfasser:	MULLER MARKUS GERHARD ANDREAS
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	A method of forming a localized SOI structure in a substrate (10) wherein a trench (18) is formed in the substrate, and a dielectric layer (20) is formed on the base of the trench (18). The trench is filled with semiconductor material (22) by means of epitaxial growth.