RADIATION SOURCE

A radiation source includes a chamber, a supply constructed and arranged to supply a substance to the chamber at a location that allows the substance to pass through an interaction point within the chamber, a laser constructed and arranged to provide a laser beam to the interaction point so that a r...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: IVANOV VLADIMIR VITALEVICH, BANINE VADIM YEVGENYEVICH
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:A radiation source includes a chamber, a supply constructed and arranged to supply a substance to the chamber at a location that allows the substance to pass through an interaction point within the chamber, a laser constructed and arranged to provide a laser beam to the interaction point so that a radiation emitting plasma is produced when the laser beam interacts with he substance at the interaction point, and a conduit constructed and arranged to deliver unheated buffer gas into the chamber at a location adjacent to the interaction point at a rate that removes heated buffer gas from a region around the interaction point before a subsequent interaction between the laser beam and the substance at the interaction point.