DATA VERIFICATION METHOD, DATA VERIFICATION DEVICE, AND DATA VERIFICATION PROGRAM

A data verification method includes extracting a first graphic and a second graphic from a first circuit pattern, extracting a third graphic and a fourth graphic from a second circuit pattern, the second circuit pattern being in a layer different than a layer including the first circuit pattern; per...

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1. Verfasser: MAKIHARA JUN
Format: Patent
Sprache:eng
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Zusammenfassung:A data verification method includes extracting a first graphic and a second graphic from a first circuit pattern, extracting a third graphic and a fourth graphic from a second circuit pattern, the second circuit pattern being in a layer different than a layer including the first circuit pattern; performing transformation on the first graphic; comparing the first graphic having undergone the transformation with the second graphic; performing the transformation on the third graphic; comparing the third graphic having undergone the transformation with the fourth graphic; when the first graphic having undergone the transformation matches the second graphic, and the third graphic having undergone the transformation matches the fourth graphic, performing grouping for the first and second graphics and setting the first graphic as a first representative graphic; and verifying a shape of the first circuit pattern based on the first representative graphic.