MEMS Compact Switched Capacitor

A switched capacitor is characterized in that it comprises a series MEMS-type switch, the capacitor to be switched being integrated into the structure of the MEMS switch and being formed by an additional metal layer produced on part of the dielectric layer of the MEMS switch, the capacitance of the...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	REBERNAK WILLIAM, LE BAILLIF MATTHIEU, DUSSAUBY MARIE-PIERRE, ZIAEI AFSHIN, GIRAUDO MICHEL, NEVEU GILLES
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS BASIC ELECTRONIC CIRCUITRY CAPACITORS CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES ORLIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE ELECTRICITY IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS RESONATORS
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Beschreibung
Zusammenfassung:	A switched capacitor is characterized in that it comprises a series MEMS-type switch, the capacitor to be switched being integrated into the structure of the MEMS switch and being formed by an additional metal layer produced on part of the dielectric layer of the MEMS switch, the capacitance of the switched capacitor being set as a function of the area of the metal layer.