REDUCED OXIDATION SYSTEM FOR WIRE BONDING

A wire bonding machine is provided. The wire bonding machine includes (1) a bond site area for holding a semiconductor device during a wire bonding operation, and (2) a gas supply line configured to provide a gas at the bond site area from above the bond site area.

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Bibliographische Detailangaben
Hauptverfasser: GILLOTTI GARY S, MAK STEVEN, FRASCH E. WALTER
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:A wire bonding machine is provided. The wire bonding machine includes (1) a bond site area for holding a semiconductor device during a wire bonding operation, and (2) a gas supply line configured to provide a gas at the bond site area from above the bond site area.