SOLUTION DEPOSITION AND METHOD WITH SUBSTRATE MAKING

A metal and oxygen material such as a transparent electrically conductive oxide material is electro deposited onto a substrate in a solution deposition process. Process parameters are controlled so as to result in the deposition of a high quality layer of material which is suitable for use in a back...

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Bibliographische Detailangaben
Hauptverfasser: YOUNAN KAIS, DOTTER, II BUD, CANNELLA VINCENT, YANG JEFFREY, LIU SHENGZHONG, HU CHAOLAN, ZHOU YANHUA, GUHA SUBHENDU, BANERJEE ARINDAM
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A metal and oxygen material such as a transparent electrically conductive oxide material is electro deposited onto a substrate in a solution deposition process. Process parameters are controlled so as to result in the deposition of a high quality layer of material which is suitable for use in a back reflector structure of a high efficiency photovoltaic device. The deposition may be carried out in conjunction with a masking member which operates to restrict the deposition of the metal and oxygen material to specific portions of the substrate. In particular instances the deposition may be implemented in a continuous, roll-to-roll process. Further disclosed are semiconductor devices and components of semiconductor devices made by the present process, as well as apparatus for carrying out the process.