PROCESS FOR PREPARING ROTORS OR STATORS OF A TURBOMOLECULAR PUMP
The invention relates to a process for preparing rotors or stators of a turbomolecular pump with rotor blades made of a specific aluminum alloy.
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | The invention relates to a process for preparing rotors or stators of a turbomolecular pump with rotor blades made of a specific aluminum alloy. |
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