MULTI-WIRE ELECTRON DISCHARGE MACHINE

A multi-wire electron discharge machine includes a first wire electrode for creating an electrical discharge between the first electrode wire and a semiconductor ingot, a second wire electrode for creating an electrical discharge between the second electrode wire and the semiconductor ingot, and a w...

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Bibliographische Detailangaben
Hauptverfasser: BAMBERG EBERHARD, RAKWAL DINESH R
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A multi-wire electron discharge machine includes a first wire electrode for creating an electrical discharge between the first electrode wire and a semiconductor ingot, a second wire electrode for creating an electrical discharge between the second electrode wire and the semiconductor ingot, and a wire guide for maintaining the first wire electrode in a spaced apart and generally parallel orientation with respect to the second wire electrode across a semiconductor ingot slicing area.