Fabrication Process for Co-Fabricating a Multilayer Probe Array and a Space Transformer

Embodiments of the invention provide electrochemical fabrication processes that may be used for the fabrication of space transformers or the co-fabrication of microprobe arrays along with one or more space transformers.

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Bibliographische Detailangaben
Hauptverfasser: BANG CHRISTOPHER A, LOCKARD MICHAEL S, COHEN ADAM L, LEMBRIKOV PAVEL B, ARAT VACIT
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:Embodiments of the invention provide electrochemical fabrication processes that may be used for the fabrication of space transformers or the co-fabrication of microprobe arrays along with one or more space transformers.