SEMICONDUCTOR DEVICE COMPRISING A DISTRIBUTED INTERCONNECTED SENSOR STRUCTURE FOR DIE INTERNAL MONITORING PURPOSES

SEMICONDUCTOR DEVICE COMPRISING A DISTRIBUTED INTERCONNECTED SENSOR STRUCTURE FOR DIE INTERNAL MONITORING PURPOSES

In a semiconductor device, electrical measurement data may be obtained with enhanced spatial resolution, for instance from within the entire die region, by providing a distributed sensor structure, each of which may be individually accessed by an appropriate interconnect structure, while nevertheles...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LEHR MATTHIAS, GRILLBERGER MICHAEL
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:In a semiconductor device, electrical measurement data may be obtained with enhanced spatial resolution, for instance from within the entire die region, by providing a distributed sensor structure, each of which may be individually accessed by an appropriate interconnect structure, while nevertheless maintaining the required number of terminals and test signals at a low level.