METHOD FOR THE SPATIALLY RESOLVED MEASUREMENT OF BIREFRINGENCE, AND A MEASURING APPARATUS

A method for the spatially resolved measurement of the birefringence distribution of a cylindrically symmetrical blank (2) made from an optical material transparent to at least one wavelength λB between 180 nm and 650 nm, in particular at 193 nm, including: irradiating the blank (2), arranged in a c...

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Bibliographische Detailangaben
Hauptverfasser: PAHL ULRICH, SPANUTH JENS
Format: Patent
Sprache:eng
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