METHOD FOR THE SPATIALLY RESOLVED MEASUREMENT OF BIREFRINGENCE, AND A MEASURING APPARATUS

A method for the spatially resolved measurement of the birefringence distribution of a cylindrically symmetrical blank (2) made from an optical material transparent to at least one wavelength λB between 180 nm and 650 nm, in particular at 193 nm, including: irradiating the blank (2), arranged in a c...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	PAHL ULRICH, SPANUTH JENS
Format:	Patent
Sprache:	eng
Schlagworte:	COLORIMETRY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT MEASURING PHYSICS RADIATION PYROMETRY TESTING TESTING STATIC OR DYNAMIC BALANCE OF MACHINES ORSTRUCTURES TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	A method for the spatially resolved measurement of the birefringence distribution of a cylindrically symmetrical blank (2) made from an optical material transparent to at least one wavelength λB between 180 nm and 650 nm, in particular at 193 nm, including: irradiating the blank (2), arranged in a container (4) with an immersion fluid (5), at a jacket-side measurement position (MP) using a measuring light beam (9) which runs in a measuring direction (Y) preferably perpendicular to the axis of symmetry (S) of the blank (2), as well as varying the jacket-side measurement position (MP) by moving the measuring light beam (9) and the blank (2) relative to one another in two directions (X, Z) perpendicular to the measuring direction (Y) for the purpose of spatially resolved measurement of the non-axial birefringence distribution of the blank (2).