STRUCTURE OF SOLAR CELL PANEL AND MANUFACTURING METHOD OF ELECTRODE OF SOLAR CELL PANEL

A manufacturing method of electrode of solar cell panel of the present invention comprises steps of providing a semiconductor substrate with an antireflection layer/a dielectric layer and a first metal layer in sequence, forming a first metal layer on the antireflection layer, projecting a pattern o...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: CHEN TIEN-SZU, CHANG KAI-SHENG, OU NAI-TIEN
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A manufacturing method of electrode of solar cell panel of the present invention comprises steps of providing a semiconductor substrate with an antireflection layer/a dielectric layer and a first metal layer in sequence, forming a first metal layer on the antireflection layer, projecting a pattern on the first metal layer by a laser beam to form a metal silicide on the semiconductor substrate in accordance with the outline of the pattern, removing the first metal layer by a chosen solution, forming a first electrode connecting to the metal silicide and exposed to a surface of the antireflection layer; and forming a second electrode on a surface of the semiconductor substrate opposite to the antireflection layer.