Position measuring apparatus

A position measuring apparatus including a first irradiating part that irradiates a first beam to an object, a second irradiating part that irradiates a second beam to the object, a capturing part that captures images of the object, a processing part that generates a first difference image and a sec...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ENDOH TOSHIO, YOKOI HIRONORI
Format:	Patent
Sprache:	eng
Schlagworte:	CALCULATING COMPUTING COUNTING HANDLING RECORD CARRIERS PHYSICS PRESENTATION OF DATA RECOGNITION OF DATA RECORD CARRIERS
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