Nonvolatile Memory Devices Having Charge-Trap Layers Therein with Relatively High Election Affinity

Provided is a nonvolatile memory device. The nonvolatile memory device may include a tunnel insulating layer on a semiconductor substrate; a charge trap layer disposed on the tunnel insulating layer and having an electron affinity greater than a silicon nitride layer; a barrier insulating layer on t...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: JO SEON-HO, CHUNG CHUNHYUNG, KIM YOUNG-SUN, PARK YOUNG-GEUN, YANG JUNKYU, CHOI EUNSOK, CHOI HANMEI
Format: Patent
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:Provided is a nonvolatile memory device. The nonvolatile memory device may include a tunnel insulating layer on a semiconductor substrate; a charge trap layer disposed on the tunnel insulating layer and having an electron affinity greater than a silicon nitride layer; a barrier insulating layer on the charge trap layer; a blocking insulating layer on the barrier insulating layer; and a gate electrode on the blocking insulating layer. An electron affinity of the barrier insulating layer is smaller than an electron affinity of the blocking insulating layer.