TRAP APPARATUS, EXHAUST SYSTEM AND PROCESSING SYSTEM USING SAME

Provided is a trap apparatus, disposed in an exhaust passage 22 for discharging an exhaust gas from a processing chamber 10 for processing a wafer W, thereby to trap exhaust from the exhaust gas, so that the exhaust trapped by a trap element can be efficiently removed to regenerate the trap element....

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser:	YAMAZAKI RYOJI
Format:	Patent
Sprache:	eng
Schlagworte:	BLASTING COMBINED HEATING AND REFRIGERATION SYSTEMS HEAT PUMP SYSTEMS HEATING LIGHTING LIQUEFACTION SOLIDIFICATION OF GASES MANUFACTURE OR STORAGE OF ICE MECHANICAL ENGINEERING PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL REFRIGERATION MACHINES, PLANTS OR SYSTEMS REFRIGERATION OR COOLING SEPARATION TRANSPORTING WEAPONS
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Beschreibung
Zusammenfassung:	Provided is a trap apparatus, disposed in an exhaust passage 22 for discharging an exhaust gas from a processing chamber 10 for processing a wafer W, thereby to trap exhaust from the exhaust gas, so that the exhaust trapped by a trap element can be efficiently removed to regenerate the trap element. The trap apparatus includes a housing 42 disposed in the exhaust passage, a trap element 48 disposed in the housing for trapping the exhaust, a trap heating unit 54 for heating the trap element, a coolant introducing unit 60 for introducing a coolant into the housing, a coolant discharging unit 62 for discharging the coolant from the housing, and a controller 88 which performs a control to introduce the coolant from the coolant introducing unit into the housing, while the trap element being heated by the trap heating unit, to remove the exhaust trapped by the trap element.